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Petri net-based cycle time analysis of dual-arm cluster tools with wafer revisiting and swapping strategy

Abstract : There are wafer fabrication processes in cluster tools that require revisiting. It is shown that swapping is efficient in operating a dual-arm cluster tool. For dual-arm cluster tools with wafer revisiting, if a swap strategy is applied, it forms a three wafer periodical process with three wafers completed in each period. Such a period contains three cycles in a revisiting process and another three cycles in non-revisiting process. Hence, analysis and scheduling of dual-arm cluster tools with wafer revisiting become very complicated. In this work, a Petri net model is developed to describe the operations of such tools. Based on it, it is found that if a swap strategy is applied to a dual-arm cluster tool with wafer revisiting, it is always in a transient state. A systematic method is presented to analyze its performance.
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Conference papers
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https://hal.archives-ouvertes.fr/hal-00653946
Contributor : Frédéric Davesne <>
Submitted on : Tuesday, December 20, 2011 - 3:54:42 PM
Last modification on : Wednesday, July 15, 2020 - 10:36:10 AM

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Naiqi Wu, Feng Chu, Chengbin Chu, Mengchu Zhou. Petri net-based cycle time analysis of dual-arm cluster tools with wafer revisiting and swapping strategy. IEEE International Conference on Robotics and Automation (ICRA 2011), May 2011, Shanghai, China. pp.5499--5504, ⟨10.1109/ICRA.2011.5980119⟩. ⟨hal-00653946⟩

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