Micromechanical Properties of Nanometer-Thick Layers of Implanted Alumina

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Submitted on : Monday, June 17, 2019 - 3:36:44 PM
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J. Jagielski, A. Piatkowska, Zdzislaw Librant, P. Aubert, C. Legrand-Buscema, et al.. Micromechanical Properties of Nanometer-Thick Layers of Implanted Alumina. Solid State Phenomena, 2005, 101-102, pp.213-216. ⟨10.4028/www.scientific.net/SSP.101-102.213⟩. ⟨hal-02157921⟩

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