Micromechanical Properties of Nanometer-Thick Layers of Implanted Alumina

J. Jagielski (1, 2) , A. Piatkowska (1) , Zdzislaw Librant (3) , P. Aubert (4) , C. Legrand-Buscema (4) , O. Maciejak (4) , J. Piekoszewski (2) , Z. Werner (2)

1 IEMT - Institute of Electronic Materials Technology
2 THE ANDRZEJ SOLTAN INSTITUTE FOR NUCLEAR STUDIES - The Andrzej Soltan Institute for Nuclear Studies
3 IEMT - Institute of Electronic Materials Technology
4 LEMN - Laboratoire d'étude des milieux nanométriques

Keywords: Ion implantation; ceramics; friction; nanohardness

Domains: Mechanics of materials [physics.class-ph]

J. Jagielski, A. Piatkowska, Zdzislaw Librant, P. Aubert, C. Legrand-Buscema, et al.. Micromechanical Properties of Nanometer-Thick Layers of Implanted Alumina. Solid State Phenomena, 2005, 101-102, pp.213-216. ⟨10.4028/www.scientific.net/SSP.101-102.213⟩. ⟨hal-02157921⟩